Swagelok^® 원자층 가공용 초고순도 다이어프램 밸브(ALD7 시리즈)

Swagelok ALD7 초고순도 밸브는 신규 또는 기존 반도체 제조 장비의 칩 생산량을 극대화하는 데 필요한 유량 일관성과 용량, 액추에이터 속도, 온도 등급, 청정도를 제공합니다.

The Swagelok^® ALD7 ultrahigh-purity diaphragm valve for atomic layer deposition (ALD) processing enables semiconductor tool manufacturers and chip fabricators to increase viable chip yields and enhances profitability by enabling the flow consistency and capacity, actuator speed, and performance at high temperatures necessary to overcome production processes limitations. It provides consistent performance from valve to valve, dose to dose, and chamber to chamber over an ultrahigh cycle life.

The Swagelok ALD7 valve:

Delivers quick, precise dosing over the course of millions of cycles in even the most demanding applications and features enhanced actuator technology with a response time as low as 5 ms
Is resistant to corrosive gases with a valve body comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel
Can be heated up to 200°C while keeping the pneumatic actuator below maximum operating temperature of 150°C
Delivers a flow coefficient (C_v) up to 0.7 (with optional custom (factory-set) versions available that deliver a flow coefficient of 0.5–0.7 C_v)
Maintains the same footprint as Swagelok industry-standard ALD valves and features an integrated thermal isolator to maximize limited space near the reaction chamber

See ALD7 Valves Up Close

ALD7 Valve Specifications

Working Pressure	Vacuum to 145 psig (10.0 bar)
Burst Pressure	>3200 psig (220 bar)
Actuation Pressure	60 to 120 psig (4.1 to 8.27 bar)
Temperature Rating	Standard valve body from 32°F (0°C) to 392°F (200°C)
Flow Coefficient	Standard 0.7 C_v (factory set)
Body Materials	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections	Type: VCR^® fittings, tube butt weld, 1.5 in. modular surface-mount high flow C-seal

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ALD7 Series Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Мембранные клапаны для напыления с точностью до атомного слоя ALD

Характеристики: Сверхвысокий циклический срок службы с высокой скоростью срабатывания; Cv в диапазоне от 0,27 до 0,62; возможность работы при температуре до 392 °F (200 °C) с термостойкими приводами; вариант исполнения с электронным датчиком положения привода; подходят для применения в сверхчистых системах с корпусом из нержавеющей стали 316L VIM-VAR; торцевые соединения VCR®, под приварку встык и модульные торцевые соединения для монтажа на поверхность.

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